Acta Optica Sinica, Volume. 39, Issue 3, 0324001(2019)
Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition
The uniformity distributions of the anti-reflection (AR) coatings prepared on the quartz tube surfaces by the atomic layer deposition (ALD) technique as well as the influences of the inner diameter, outer diameter, and quartz tube length on the uniformity distributions of the deposited coatings are studied. With the single-wavelength AR coatings as the research object, the reflectivity spectrum from the experimental test matches well with the simulated result. The minimum reflectivity on the quartz tube surface is decreased to 0.17%. If the effect of the sample holder is ignored, the non-uniformity of the AR coatings for the outer and the inner surfaces of the quartz tubes is roughly identical,which is within the range of ±1.69%. The thicknesses and the central wavelengths of the AR coatings for the inner and outer surfaces are almost identical. Moreover, the variation of the quartz tube size has no obvious effect on the coating uniformity of the outer and inner surfaces. Therefore, the AR coatings with small thickness deviations and similar uniformity distributions can be deposited on the outer and inner surfaces of large curvature elements by the ALD technology.
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Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001
Category: Optics at Surfaces
Received: Sep. 25, 2018
Accepted: Oct. 30, 2018
Published Online: May. 10, 2019
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