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Chinese Optics Letters, Volume. 13, Issue s1, S12203(2015)

SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser

Zhiyu Zhang1, Yang Xu2, and Binzhi Zhang1
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China
  • 2Jilin University, Changchun 130025, China
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    Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 7, 2014

    Accepted: Jul. 16, 2014

    Published Online: Jan. 27, 2015

    The Author Email:

    DOI:10.3788/col201513.s12203

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology