Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region

Chinese Optics Letters, Volume. 6, Issue 4, 310(2008)

[in Chinese] and [in Chinese]^*

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Institute of Precision Optical Engineering, Tongji University, Shanghai 200092

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[in Chinese], [in Chinese]. Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region[J]. Chinese Optics Letters, 2008, 6(4): 310

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Paper Information

Received: Oct. 19, 2007

Accepted: --

Published Online: Apr. 21, 2008

The Author Email: (wangfengli@mail.tongji.edu.cn)

DOI:

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