Chinese Optics Letters, Volume. 6, Issue 4, 310(2008)

Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region

[in Chinese] and [in Chinese]*
Author Affiliations
  • Institute of Precision Optical Engineering, Tongji University, Shanghai 200092
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    The chirped Mo/Si multilayer mirror in the extreme ultraviolet region is designed to obtain sub-femtosecond pulses from high-order harmonics. Numerical simulations of temporal profile of the pulses are made for superposition of incident high-order harmonics and that of reflected ones by the chirped multilayer mirror. The normal incidence reflectivity and chirp in the wavelength range of 12.5-16.5 nm are 6.7%+-0.5% and -3617+-171 as2, respectively. Simulation results indicate that the designed chirped multilayer mirror can be used for producing 104-as pulses.

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    [in Chinese], [in Chinese]. Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region[J]. Chinese Optics Letters, 2008, 6(4): 310

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    Paper Information

    Received: Oct. 19, 2007

    Accepted: --

    Published Online: Apr. 21, 2008

    The Author Email: (wangfengli@mail.tongji.edu.cn)

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