Chinese Journal of Quantum Electronics, Volume. 31, Issue 3, 1(2014)
[in Chinese]
[1] Wang Jun, Jin Chunshui, Wang Liping, Guo Benyin, Yu Bo. Foundation and Application of Model for Multilayers Analysis in Extreme Ultra-Violet Lithography Projection[J]. Acta Optica Sinica, 2014, 34(8): 811002
[2] Zhang Chao, Zhang Jierui, Wang Yiming, Kuang Shangqi, Xie Yao. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Acta Optica Sinica, 2017, 37(6): 631001
Get Citation
Copy Citation Text
. [J]. Chinese Journal of Quantum Electronics, 2014, 31(3): 1
Download Citation
微信里点“发现”,扫一下
二维码便可将本文分享至朋友圈。
Set citation alerts for the article
CancelConfirm
Category:
Received: --
Accepted: --
Published Online: Jun. 3, 2014
The Author Email:
DOI:
CSTR:32186.14.
Topics