Researching |

Chinese Journal of Quantum Electronics, Volume. 31, Issue 3, 1(2014)

[in Chinese]

Author Affiliations

show less

Abstract Get PDF(in Chinese)

Figures&Tables (0)

Paper Information

References(0)

CLP Journals

[1] Wang Jun, Jin Chunshui, Wang Liping, Guo Benyin, Yu Bo. Foundation and Application of Model for Multilayers Analysis in Extreme Ultra-Violet Lithography Projection[J]. Acta Optica Sinica, 2014, 34(8): 811002

[2] Zhang Chao, Zhang Jierui, Wang Yiming, Kuang Shangqi, Xie Yao. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Acta Optica Sinica, 2017, 37(6): 631001

Tools

Get Citation

Copy Citation Text

. [J]. Chinese Journal of Quantum Electronics, 2014, 31(3): 1

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category:

Received: --

Accepted: --

Published Online: Jun. 3, 2014

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology