Laser & Optoelectronics Progress, Volume. 49, Issue 3, 32202(2012)

Study on Characteristics of Silicon Modification Layer on Silicon Carbide Surface

Zhang Feng*, Fan Di, and Gao Jinsong
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    Zhang Feng, Fan Di, Gao Jinsong. Study on Characteristics of Silicon Modification Layer on Silicon Carbide Surface[J]. Laser & Optoelectronics Progress, 2012, 49(3): 32202

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jul. 28, 2011

    Accepted: --

    Published Online: Jan. 5, 2012

    The Author Email: Feng Zhang (zhangfjy@yahoo.com.cn)

    DOI:10.3788/lop49.032202

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