Optics and Precision Engineering, Volume. 27, Issue 8, 1765(2019)
Ultra-precision phase-shifting locking system of scanning beam interference lithography tool
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WANG Lei-jie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kai-ming. Ultra-precision phase-shifting locking system of scanning beam interference lithography tool[J]. Optics and Precision Engineering, 2019, 27(8): 1765
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Received: Jan. 25, 2019
Accepted: --
Published Online: Jan. 19, 2020
The Author Email: Lei-jie WANG (wang-lj66@mail.tsinghua.edu.cn)
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