Optics and Precision Engineering, Volume. 27, Issue 8, 1765(2019)

Ultra-precision phase-shifting locking system of scanning beam interference lithography tool

WANG Lei-jie*... ZHANG Ming, ZHU Yu, LU Sen and YANG Kai-ming |Show fewer author(s)
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    WANG Lei-jie, ZHANG Ming, ZHU Yu, LU Sen, YANG Kai-ming. Ultra-precision phase-shifting locking system of scanning beam interference lithography tool[J]. Optics and Precision Engineering, 2019, 27(8): 1765

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    Paper Information

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    Received: Jan. 25, 2019

    Accepted: --

    Published Online: Jan. 19, 2020

    The Author Email: Lei-jie WANG (wang-lj66@mail.tsinghua.edu.cn)

    DOI:10.3788/ope.20192708.1765

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