Infrared and Laser Engineering, Volume. 53, Issue 3, 20230583(2024)

Threshold and incubation effect of femtosecond laser ablation of YAG crystals

Tao Shang1, Guoliang Deng1, Jun Wang1,2、*, Jie Wu1, Rui Cai1, Rubo Chen1, and Yunlong Xu1
Author Affiliations
  • 1College of Electronic Information, Sichuan University, Chengdu 610065, China
  • 2Suzhou Everbright Photonics Co., Ltd., Suzhou 215163, China
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    Figures & Tables(6)
    Experimental schematic diagram. (a) Schematic diagram of the experimental device; (b) Timing diagram of femtosecond laser output pulse number control
    (a) Optical micrograph of YAG crystal ablation craters under the shot of single pulse femtosecond laser (3000×); (b) Semi-log plot of D2 vs EP; (c) SEM image under single pulse (EP=3.00 μJ); (d) Cross section of ablation craters under single pulse shot
    (a) Optical micrographs (1000×) of YAG crystals after ablation with different pulse energies, with pulse number N=3 000; (b) Optical micrographs (1000×) of YAG crystals ablated with different pulse numbers, with pulse energy EP 1.67=μJ; (c) AFM ablation morphology of YAG crystals under multi-pulse action; (d) Cross section diagram of ablation craters under multi-pulses
    The semi-log plot of D2 vs EP when the number of pulses N is 3, 30, 600 and 50 000 respectively under the shot of femtosecond laser
    Experimental and fitting results of ablation threshold energy flux density (black sphere) \begin{document}$ {{F}}_{\rm{t}\rm{h}} $\end{document}(N) as a semi logarithmic function of laser pulse number N under the shot of multi pulse femtosecond laser (The red curve (Model I), blue curve (Model II), and green curve (Model III) correspond to the linear fitting of the three models, respectively)
    • Table 1. Figure 5 fits the results

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      Table 1. Figure 5 fits the results

      ParameterModel ⅠModel ⅡModel Ⅲ
      Fth,1/J·cm212.27±3.5617.79±3.6311.34±0.83
      Fth,∞/J·cm2-1.82±0.372.04±0.18
      S0.76±0.080.42±0.17-
      k--0.061±0.012
      R20.8910.9900.977
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    Tao Shang, Guoliang Deng, Jun Wang, Jie Wu, Rui Cai, Rubo Chen, Yunlong Xu. Threshold and incubation effect of femtosecond laser ablation of YAG crystals[J]. Infrared and Laser Engineering, 2024, 53(3): 20230583

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    Paper Information

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    Received: Dec. 8, 2023

    Accepted: --

    Published Online: Jun. 21, 2024

    The Author Email:

    DOI:10.3788/IRLA20230583

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