Laser & Optoelectronics Progress, Volume. 57, Issue 23, 233003(2020)
Quantitative Analysis of Cu(In,Ga)Se2 Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy
Fig. 1. LIBS experimental setup for analyzing CIGS thin film
Fig. 2. LIBS spectrum of CIGS thin film
Fig. 3. Calibration curves of different sample sets. (a) Calibration curves of xGa/x(In+Ga); (b) calibration curves of xCu/x(In+Ga)
Fig. 4. Merged calibration curves. (a) Merged calibration curve of xGa/x(In+Ga); (b) merged calibration curve of xCu/x(In+Ga)
Fig. 5. EDS and LIBS results of CIGS thin film samples S1, S2 and S3 deposited at different sputtering parameters
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Lili Dong, Shiming Liu, Junshan Xiu. Quantitative Analysis of Cu(In,Ga)Se2 Thin Films Deposited by Magnetron Sputtering Technology Using Laser-Induced Breakdown Spectroscopy[J]. Laser & Optoelectronics Progress, 2020, 57(23): 233003
Category: Spectroscopy
Received: Apr. 6, 2020
Accepted: May. 8, 2020
Published Online: Dec. 10, 2020
The Author Email: Xiu Junshan (xiujunshan@126.com)