Fig. 1. Schematic diagram of surface energy during process of metal film deposition

Fig. 2. Schematic diagram of resistance thermal evaporation device

Fig. 3. Variation curves of silver film square resistivity with thickness of aluminum infiltration layer

Fig. 4. SEM images of silver films of aluminum infiltration layer with different thicknesses

Fig. 5. Transmittance curves of silver films with different thicknesses on surface of 1nm aluminum infiltration layer

Fig. 6. Variation curve of silver film square resistivity on surface of 1nm aluminum infiltration layer with thicknesses

Fig. 7. Variation curve of silver film quality factor on surface of 1nm aluminum infiltration layer with silver film thicknesses

Fig. 8. SEM images of silver film with different thicknesses