Dynamical research on spherical micro actuator with PZT drivers

[in Chinese]

Optics and Precision Engineering, Volume. 15, Issue 2, 248(2007)

[in Chinese]

Author Affiliations

[in Chinese]

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References(4)

[3] [3] BREGUET J M,CLAVEL R.Stick and slip actuators:design,control,performances and applications[C].International Symposium on Micromechatronics and Human Science,Nagoya,Japan,1998:89-95.

[4] [4] FUCHIWAKI O,AOYAMA H.Design and control of versatile micro robot for microscopic manipulation[J].Am.Soc.Precision Eng.,2001:204-207.

[5] [5] SUN L N,CHEN H C,LI M T.3D.O.F.ball base microactuator with piezoelectric tube drivers[C].3rd International Symposium on Instrumentation Science and Technology,Xi'an,China,2004:1007-1011.

[7] [7] SUN L N,CHEN H CH,LI M T.Dynamics analysis of microactuator with PZT drivers based on inertia-friction driving principle[C].Proceedings of the 2005 IEEE International Conference on Mechatronics,Taipei,Taiwan,2005:334-339.