Fig. 1. Schematic diagram of automatic measurement of differential confocal eccentricity

Fig. 2. Influence of attitude error on central eccentricity

Fig. 3. Schematic diagram of attitude deviation elimination

Fig. 4. Least square fitting diagram

Fig. 5. Attitude error decomposition

Fig. 6. Overall block diagram of automatic measurement system for central deviation of differential confocal lens

Fig. 7. Experimental system for automatic measurement of central deviation of differential confocal lens

Fig. 8. Dynamic error of air bearing rotating shaft

Fig. 9. Fixed focus error

Fig. 10. Comparison of repeated measurements of central deviation