Optics and Precision Engineering, Volume. 31, Issue 23, 3405(2023)
Automatic measurement of center deviation of lens of laser differential confocal
To address the problems of low measurement accuracy and significant human interference in lens position adjustment in existing center deviation measurement methods, this paper proposes an automatic measurement method for the center deviation of differential confocal lenses. This method uses differential confocal focusing technology to precisely locate the cat's eye and confocal points of the measured lens, based on the fact that the zero point of the differential confocal axial light intensity response curve corresponds precisely to the characteristic point of the measured lens. The high-precision air-bearing rotating shaft drives the rotation of the measured mirror, while the displacement sensor records the position information of the measured mirror. In combination with the five-dimensional posture automatic adjustment mechanism, the high-precision correction of the attitude deviation of the measured mirror was realized, the eccentricity error was eliminated, and the measurement accuracy was improved. Finally, a laser differential confocal lens center deviation measurement system was established, which automatically measured the lens center deviation with high precision. The experimental results show that the measurement accuracy of the lens eccentricity can reach 0.41%, while the measurement repeatability is greater than 100 nm. Compared with the existing manual single measurement method, the proposed method has good repeatability, small random error, and high measurement accuracy. It serves as a new technical approach for the automatic measurement of lens eccentricity with high precision.
Get Citation
Copy Citation Text
Wei WANG, Zhuo DU, Ran CHENG, Weiqian ZHAO, Yun WANG, Lirong QIU. Automatic measurement of center deviation of lens of laser differential confocal[J]. Optics and Precision Engineering, 2023, 31(23): 3405
Category:
Received: Jul. 13, 2023
Accepted: --
Published Online: Jan. 5, 2024
The Author Email: QIU Lirong (qiugrass@126.com)