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Journal of Applied Optics, Volume. 43, Issue 4, 661(2022)

Design of two-dimensional fast steering mirror system with large aperture and high precision

Dengkui KANG1...1, Changlu JIANG1,1, Lishuang LIU1,1, Juncheng ZHAO1,1, Bing YU1,1, Qingshan CHEN1,1, Shengyun WANG1,1, Nanxi WANG1,1, Jiejing CHEN1,1, Yunlong ZHANG1,1, and Lei WANG11 |Show fewer author(s)
Author Affiliations
  • 11Xi'an Institute of Applied Optics, Xi'an 710065, China
  • 12School of Instrument Science and Optoelectronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (16)
    Equations (4)
    References (18)
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    Figures & Tables(16)
    Composition block diagram of two-dimensional FSM

    Fig. 1. Composition block diagram of two-dimensional FSM

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    Working principle diagram of two-dimensional FSM

    Fig. 2. Working principle diagram of two-dimensional FSM

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    Mirror and surface measurement diagram

    Fig. 3. Mirror and surface measurement diagram

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    Physical photo of voice coil motor

    Fig. 4. Physical photo of voice coil motor

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    Structural design diagram of two-dimensional FSM

    Fig. 5. Structural design diagram of two-dimensional FSM

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    Composition block diagram of control circuit of FSM

    Fig. 6. Composition block diagram of control circuit of FSM

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    Diagram of eddy current sensor test circuit

    Fig. 7. Diagram of eddy current sensor test circuit

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    Composition block diagram of main control circuit

    Fig. 8. Composition block diagram of main control circuit

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    Composition block diagram of drive circuit

    Fig. 9. Composition block diagram of drive circuit

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    Structure diagram of precision displacement measurement module

    Fig. 10. Structure diagram of precision displacement measurement module

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    Workflow chart of two-dimensional FSM

    Fig. 11. Workflow chart of two-dimensional FSM

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    Resolution measurement results

    Fig. 12. Resolution measurement results

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    X-axis linearity fitting straight line

    Fig. 13. X-axis linearity fitting straight line

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    • Table 1. Bandwidth measurement results

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      Table 1. Bandwidth measurement results

      X轴Y轴
      频率/Hz幅值/（"）增益/dB频率/Hz幅值/（"）增益/dB
      11000.0011000.00
      1099.41−0.051099.17−0.072
      20100.20.0172098.77−0.11
      3099.81−0.0163099.17−0.072
      4099.64−0.0314097.6−0.211
      5095.91−0.365095.24−0.42
      6091.23−0.796091.32−0.79
      7086.17−1.297086.62−1.25
      8081.12−1.818080.74−1.86
      9076.02−2.389074.87−2.51
      10071.39−2.9310070.94−2.98
      11067.44−3.4211058.79−4.61
      12063.54−3.9412050.95−5.86

    • Table 2. Linearity measurement results

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      Table 2. Linearity measurement results

      序号目标角度/（"）实际角度/（"）偏差/%
      方位俯仰方位俯仰方位俯仰
      11 0001 0001 001.8998.60.18−0.14
      23 0003 0003 005.12 997.40.17−0.86
      35 0005 0005 006.95 006.90.1860.138
      4−1 000−1 000−1 001.5−1 001.50.080.15
      5−3 000−3 000−3 005.9−3 004.70.1970.157
      6−5 000−5 000−5 008.5−5 009.50.170.19
      7−1 000−1 000−999.2−1 001.7−0.080.17
      8−3 000−3 000−2 994.7−3 005.3−0.1760.177
      9−5 000−5 000−4 991.9−4 991.6−0.162−0.168
      101 0001 0001 001.31 001.10.130.11
      113 0003 0003 005.53 005.20.1830.173
      125 0005 0005 009.75 009.20.1941.86

    • Table 3. Repetitive positioning accuracy measurement results

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      Table 3. Repetitive positioning accuracy measurement results

      序号目标位置点/（″）自准直仪角度/（″）标准偏差（3σ）/μrad
      1（1 000，0）（1 001.5，0.4）（3.5，1.2）
      （1 001.3，0.3）
      （1 001.8，0.3）
      （1 001.6，0.4）
      （1 001.2，0.2）
      2（2 000，0）（2 002.2，0.1）（4.0，1.2）
      （2 002.5，0.2）
      （2 001.9，0.1）
      （2 002.4，0.3）
      （2 002.6，0.2）
      3（3 000，0）（3 004.9，0.4）（2.8，1.0）
      （3 004.8，0.4）
      （3 005.1，0.5）
      （3 004.6，0.3）
      （3 005，0.4）
      4（−1 000，0）（−1 000.4，0.3）（3.3，1.3）
      （−1 000.6，0.4）
      （−1 000.5，0.4）
      （−1 000.2，0.2）
      （−1 000.8，0.4）
      5（−2 000，0）（−2 003.9，0.5）（3.9，1.2）
      （−2 003.6，0.6）
      （−2 003.4，0.4）
      （−2 003.7，0.6）
      （−2 003.2，0.4）
      6（−3 000，0）（−3 005.5，0.6）（4.0，1.7）
      （−3 005.8，0.4）
      （−3 005.6，0.5）
      （−3 005.9，0.3）
      （−3 005.2，0.4）
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    Dengkui KANG, Changlu JIANG, Lishuang LIU, Juncheng ZHAO, Bing YU, Qingshan CHEN, Shengyun WANG, Nanxi WANG, Jiejing CHEN, Yunlong ZHANG, Lei WANG. Design of two-dimensional fast steering mirror system with large aperture and high precision[J]. Journal of Applied Optics, 2022, 43(4): 661

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    Paper Information

    Category: OE SYSTEM AND ENGINEERING

    Received: May. 12, 2022

    Accepted: --

    Published Online: Aug. 10, 2022

    The Author Email:

    DOI:10.5768/JAO202243.0401011

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology