Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 10, Issue 1, 45(2002)

[in Chinese]... [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)

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References(5)

[1] [1] Haelbich R, Segmiiller A. Smooth multilayer films suitable for X-ray mirrors[J]. Appl. Phys. Lett, 1979, 34(3):184-186.

[2] [2] Thomas N. Low-scatter, low-loss mirrors for laser gyros[J]. SPIE, 1978, 157: 41-48.

[4] [4] Moran M. Scatter intensity mapping of laser-illuminated coating defects[J]. Appl. Opt, 1988, 27: 957-962.

[7] [7] Ralph J. Schwarz and Bernard Friedland, Linear Systems[M].New York:McGraw-hill Book Company, 1965.

[8] [8] Church E L , Vorburger T V, Wyant J C,et al. Direct comparison of mechanical and optical measurements of the finish of precision machined optical surfaces[J]. Opt. Eng,1985, 24(3): 388-395.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45

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