Optics and Precision Engineering, Volume. 10, Issue 1, 45(2002)
Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45