Optics and Precision Engineering, Volume. 10, Issue 1, 45(2002)

Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface

[in Chinese]... [in Chinese], [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(5)

    [1] [1] Haelbich R, Segmiiller A. Smooth multilayer films suitable for X-ray mirrors[J]. Appl. Phys. Lett, 1979, 34(3):184-186.

    [2] [2] Thomas N. Low-scatter, low-loss mirrors for laser gyros[J]. SPIE, 1978, 157: 41-48.

    [4] [4] Moran M. Scatter intensity mapping of laser-illuminated coating defects[J]. Appl. Opt, 1988, 27: 957-962.

    [7] [7] Ralph J. Schwarz and Bernard Friedland, Linear Systems[M].New York:McGraw-hill Book Company, 1965.

    [8] [8] Church E L , Vorburger T V, Wyant J C,et al. Direct comparison of mechanical and optical measurements of the finish of precision machined optical surfaces[J]. Opt. Eng,1985, 24(3): 388-395.

    CLP Journals

    [1] ZHANG Qiu-jia, ZHAO Yu-hua, HAN Dong, YU Ping, LIU Ming-zhu. On-line Measurement of Surface Roughness Based on Laser Two-dimensional Scattering Principle[J]. Opto-Electronic Engineering, 2011, 38(6): 110

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 22, 2001

    Accepted: --

    Published Online: Sep. 18, 2007

    The Author Email:

    DOI:

    Topics