Optics and Precision Engineering, Volume. 10, Issue 1, 45(2002)
Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45