Optics and Precision Engineering, Volume. 10, Issue 1, 45(2002)

Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45

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    Received: Mar. 22, 2001

    Accepted: --

    Published Online: Sep. 18, 2007

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