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Acta Photonica Sinica, Volume. 48, Issue 2, 222003(2019)

Mirrors of Beam Stabilization System for Immersion Lithography

LI Mei-xuan1...2,*, LI Hong1,2, ZHANG Si-qi1,2, GUO Ming1,2 and FU Xiu-hua3 |Show fewer author(s)
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  • 1[in Chinese]
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  • 3[in Chinese]
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    LI Mei-xuan, LI Hong, ZHANG Si-qi, GUO Ming, FU Xiu-hua. Mirrors of Beam Stabilization System for Immersion Lithography[J]. Acta Photonica Sinica, 2019, 48(2): 222003

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    Paper Information

    Received: Oct. 17, 2018

    Accepted: --

    Published Online: Mar. 23, 2019

    The Author Email: Mei-xuan LI (limx@jlenu.edu.cn)

    DOI:10.3788/gzxb20194802.0222003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology