Laser & Optoelectronics Progress, Volume. 58, Issue 9, 0907001(2021)

White Light Interference Signal Processing Method Based on Fourier Frequency Spectrum Analysis

Hailong Du1、*, Zhaobin Duan1, and Xiaodong Sun2
Author Affiliations
  • 1Engineering Techniques Training Center National Experimental Teaching Demonstrating Center, Civil Aviation University of China, Tianjin 300300, China
  • 2School of Electrical and Electronic Engineering, Tiangong University, Tianjin 300387, China
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    References(11)

    [1] Deng Q Y, Tang Y, Zhou Y et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry[J]. Chinese Journal of Lasers, 45, 0604001(2018).

    [2] Kassamakov I, Tureanu A, Heikkinen V et al. Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer[J]. Applied Optics, 56, 2483-2488(2017).

    [3] Zou Y B, Li Y N, Kaestner M et al. Low-coherence interferometry based roughness measurement on turbine blade surfaces using wavelet analysis[J]. Optics and Lasers in Engineering, 82, 113-121(2016).

    [4] Park M, Kim S. Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms[J]. Optical Engineering, 39, 952-959(2000).

    [5] de Groot P, de Colonna Lega X, Kramer J et al. Determination of fringe order in white-light interference microscopy[J]. Applied Optics, 41, 4571-4578(2002).

    [6] Lehmann P. Vertical scanning white-light interference microscopy on curved microstructures[J]. Optics Letters, 35, 1768-1770(2010).

    [7] Luo S, Sasaki O, Chen Z et al. Exact surface profile measurement without subtracting dispersion phase through Fourier transform in a white-light scanning interferometer[J]. Applied Optics, 57, 894-899(2018).

    [8] Chen D, Schmit J, Novak M. Real-time scanner error correction in white light interferometry[J]. SPIE of Proceedings, 9276, 92760I(2014).

    [9] Mun J I, Jo T, Kim T et al. Residual vibration reduction of white-light scanning interferometry by input shaping[J]. Optics Express, 23, 464-470(2015).

    [10] Pikálek T, Fořt T, Buchta Z. Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy[J]. Applied Optics, 53, 8463-8470(2014).

    [11] Harasaki A, Schmit J, Wyant J C. Improved vertical-scanning interferometry[J]. Applied Optics, 39, 2107-2115(2000).

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    Hailong Du, Zhaobin Duan, Xiaodong Sun. White Light Interference Signal Processing Method Based on Fourier Frequency Spectrum Analysis[J]. Laser & Optoelectronics Progress, 2021, 58(9): 0907001

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    Paper Information

    Category: Fourier Optics and Signal Processing

    Received: Aug. 31, 2020

    Accepted: Sep. 30, 2020

    Published Online: May. 12, 2021

    The Author Email: Du Hailong (hldu@cauc.edu.cn)

    DOI:10.3788/LOP202158.0907001

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