Fig. 1. Schematic diagram of structure resonant frequency of FSM

Fig. 2. Schematic diagram of FSM assembly axis not coinciding with working axis

Fig. 3. Principle diagram of dual feedforward + dual neural network adaptive decoupling control

Fig. 4. Schematic diagram of NN1 neural network topology structure

Fig. 5. A step signal of 1 mrad is applied separately to X and Y axis—Step response curve of traditional PID control decoupling algorithm

Fig. 6. A step signal of 1 mrad is applied simultaneously to X and Y axis—Step response curve of traditional PID control decoupling algorithm

Fig. 7. A step signal of 1 mrad is applied separately to X and Y axis—Step response curve of dual feedforward + dual neural network adaptive decoupling control algorithm

Fig. 8. A step signal of 1 mrad is applied simultaneously to X and Y axis—Step response curve of dual feedforward + dual neural network adaptive decoupling control algorithm