Acta Optica Sinica, Volume. 42, Issue 23, 2334001(2022)

Design, Development and Commissioning of 3D Nano Image Beamline at Shanghai Synchrotron Radiation Facility

Fen Tao1, Ling Zhang1, Bo Su2,3, Ruoyang Gao2,3, Guohao Du1, Biao Deng1,2,3、*, Honglan Xie1, and Tiqiao Xiao1
Author Affiliations
  • 1Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
  • 2Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(10)
    Overall layout of 3D nano image beamline at SSRF
    Schematic diagram of 3D nano image beamline endstation at SSRF
    Schematic diagram of rotating ellipsoidal capillary[15]
    TXM system independently developed by SSRF
    XANES spectra. (a) XANES spectrum of Ti K-edge; (b) XANES spectrum of Au L1-edge
    Three test results of rocking curve at energy of 8 keV
    Image result and power spectral density curve of start bar. (a) Image result of start bar; (b) power spectral density curve
    • Table 1. Design goals of 3D nano image beamline at SSRF

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      Table 1. Design goals of 3D nano image beamline at SSRF

      ComponentIndexValue
      BeamlineEnergy range /keV5-14
      Energy resolution @8 keV5.0×10-4
      Photon flux at sample@8 keV@300 mA /(photon·s-15×109
      EndstationSpatial resolution@8 keV(TXM)/nm20
    • Table 2. Parameter of ellipsoidal capillary

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      Table 2. Parameter of ellipsoidal capillary

      ModelLength of ellipsoidal capillary L /mm

      Entry radius

      H /μm

      Exit radius h /μmSemi major axis a /mmSemi minor axis b /mmWorking distance W /mmMaximum accepted divergence of capillary φ2 /mrad
      ABS25-810128117210000.524556.2
    • Table 3. Three test results of energy resolution

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      Table 3. Three test results of energy resolution

      Test No.Peak position /μradFWHM /μradEnergy resolution

      Average of

      ΔE/E

      1188.6446.921.84×10-4(1.83±0.01)×10-4
      2187.8146.921.84×10-4
      3187.8146.351.82×10-4
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    Fen Tao, Ling Zhang, Bo Su, Ruoyang Gao, Guohao Du, Biao Deng, Honglan Xie, Tiqiao Xiao. Design, Development and Commissioning of 3D Nano Image Beamline at Shanghai Synchrotron Radiation Facility[J]. Acta Optica Sinica, 2022, 42(23): 2334001

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    Paper Information

    Category: X-Ray Optics

    Received: Mar. 29, 2022

    Accepted: Jun. 4, 2022

    Published Online: Dec. 14, 2022

    The Author Email: Deng Biao (dengbiao@zjlab.org.cn)

    DOI:10.3788/AOS202242.2334001

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