Acta Optica Sinica, Volume. 42, Issue 23, 2334001(2022)

Design, Development and Commissioning of 3D Nano Image Beamline at Shanghai Synchrotron Radiation Facility

Fen Tao1, Ling Zhang1, Bo Su2,3, Ruoyang Gao2,3, Guohao Du1, Biao Deng1,2,3、*, Honglan Xie1, and Tiqiao Xiao1
Author Affiliations
  • 1Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
  • 2Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Full-field transmission X-ray microscope (TXM) has been widely applied in many research fields owing to its various strengths, such as in-suit non-destructive three-dimensional (3D) imaging with a nanoscale spatial resolution. 3D nano image beamline, a part of the Shanghai Synchrotron Radiation Facility (SSRF) phase-II project, focuses on cutting-edge scientific problems and national strategic needs. The main experimental methods are TXM and nano-computed tomography (nano-CT), and the energy range is 5-14 keV. The design goal for spatial resolution is 20 nm. Based on a bending magnet source, the beamline is built with a cylindrical collimating mirror, a double crystal monochromator, and a toroidal condenser. The experimental endstation adopts a self-designed and integrated full-field TXM system, and the mono-capillary condenser, the TXM mechanical system, and the nano-CT control and data acquisition software of the experimental endstation are all developed independently. The commissioning and performance tests of the SSRF 3D nano image beamline (BL18B) have been completed in 2021, with a resolution of 20 nm achieved for TXM imaging. This beamline is the first TXM beamline based on a bending magnet source in the world with a 20 nm imaging resolution. All the test results have reached the design goals for this beamline, and it will open to users in 2022.

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    Fen Tao, Ling Zhang, Bo Su, Ruoyang Gao, Guohao Du, Biao Deng, Honglan Xie, Tiqiao Xiao. Design, Development and Commissioning of 3D Nano Image Beamline at Shanghai Synchrotron Radiation Facility[J]. Acta Optica Sinica, 2022, 42(23): 2334001

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    Paper Information

    Category: X-Ray Optics

    Received: Mar. 29, 2022

    Accepted: Jun. 4, 2022

    Published Online: Dec. 14, 2022

    The Author Email: Deng Biao (dengbiao@zjlab.org.cn)

    DOI:10.3788/AOS202242.2334001

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