Laser & Optoelectronics Progress, Volume. 56, Issue 14, 141602(2019)

Properties of Sol-Gel-Modified SiO2 Antireflective Films by Spin Coating

Bin Shen*, Haiyuan Li, and Xu Zhang
Author Affiliations
  • Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Figures & Tables(9)
    Particle distribution of SiO2 coating solutions before and after filtration
    Process flow chart of ultrasonic cleaning
    Surface of substrate after hand cleaning. (a) Enlarged by 50 times; (b) enlarged by 200 times
    Surface of substrate after ultrasonic cleaning. (a) Enlarged by 50 times; (b) enlarged by 200 times
    Films on small size square KDP crystals by single spin coating method. (a) 3ω; (b) 1ω/2ω
    Transmittance of small size square crystals coated film
    Damage thresholds of films before and after defect control
    • Table 1. Water contact angles of substrates with different cleaning methods

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      Table 1. Water contact angles of substrates with different cleaning methods

      Cleaning methodsContact angle 1Contact angle 2Contact angle 3Contact angle 4
      Hand cleaning /(°)62.159.366.163.0
      Ultrasonic cleaning /(°)38.737.937.735.1
    • Table 2. Transmittance peak wavelengths of small size square crystals coated film

      View table

      Table 2. Transmittance peak wavelengths of small size square crystals coated film

      AreaAfter coating 3ω antireflection filmAfter coating 1ω/2ω antireflection film
      Peak transmittance /%Peak wavelength /nmPeak transmittance /%Peak wavelength /nm
      1>99.6343-355>99.9689-702
      2>99.7338-353>99.8694-702
      3>99.7338-349>99.8709-720
      4>99.5348-359>99.9694-702
      5>99.6347-360>99.9710-720
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    Bin Shen, Haiyuan Li, Xu Zhang. Properties of Sol-Gel-Modified SiO2 Antireflective Films by Spin Coating[J]. Laser & Optoelectronics Progress, 2019, 56(14): 141602

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    Paper Information

    Category: Materials

    Received: Jan. 23, 2019

    Accepted: Feb. 21, 2019

    Published Online: Jul. 12, 2019

    The Author Email: Shen Bin (bingo2011@siom.ac.cn)

    DOI:10.3788/LOP56.141602

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