Optics and Precision Engineering, Volume. 20, Issue 10, 2123(2012)
Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad
[1] [1] CHOYKE W J, FARICH R F, HOFFMAN R A. SiC, a new material for mirrors 1: high powerlasers;2: VUV applications[J]. Appl. Opt., 1976,15(9): 2006-2007.
[2] [2] GOLINI D,JACOBS S D. Physics of loose abrasive microgrinding[J]. Appl. Opt., 1991,30(19): 2761-2777.
[3] [3] LAMBROPOULOS J C, XU S,FANG T. Loose abrasive lapping hardness of optical glasses and its interpretation[J]. Appl. Opt.,1997,36(7): 1501-1516.
[4] [4] GILLMAN B E,JACOBS S D.Bound-abrasive polishers for optical glass[J]. Appl.Opt.,1998,37(6): 3498-3504.
[5] [5] EDWARDS D F,HED P P. Optical glass fabrication technology. 1: fine grinding mechanism using bound diamond abrasives[J]. Appl. Opt.,1987,26(21): 4670-4676.
[6] [6] FLETCHER T D, DRONEN B,GOBENA F T, et al..Fixed abrasive flat lapping with 3M trizact diamond tile abrasive pads[C].Presented at Optifab 2003, Rochester, New York, May 2003.
[7] [7] FLETCHER T,GOBENA F,ROMERO V.Diamond fixed abrasive lapping of brittle substrates[C].Presented at the OSA Optical Fabrication & Testing Topical Meeting , Rochester NY,2004.
[8] [8] BIFANO T, YI Y,KAHL W K. Fixed abrasive grinding of CVD SiC mirrors[J].Precision Engineering,1994,16(2): 109-116.
[9] [9] JONES B A. Optimization of computer controlled polishing[J]. Appl. Opt.,1977,16(1): 218-224.
[10] [10] JONES R A. Fabrication of small nonsymmetrical aspheric surfaces[J]. Appl. Opt.,1979,18(8): 1244-1246.
[11] [11] WANG X, ZHANG X J. Theoretical study on removal rate and surface roughness in grinding RB-SiC mirror with a fixed abrasive[J]. Appl. Opt., 2009,48(5): 904-910.
[13] [13] ZHANG X J, ZHANG ZH Y, LI Z L. Manufacturing and testing of 1-m class SiC aspherical mirror[J].SPIE ,2007,6721: 672109.
[14] [14] ZHENG L G, ZHANG X J. Novel resistance iterative algorithm for CCOS[J].SPIE ,2006,6288: 62880N.
[15] [15] ZHOU W, BOVIK A C,SHEIKH H R, et al.. Image quality assessment: from error visibility to structural similarity[J]. IEEE Transactions on Image Processing,2004,13(4): 600-612.
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WANG Xu. Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad[J]. Optics and Precision Engineering, 2012, 20(10): 2123
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Received: May. 25, 2012
Accepted: --
Published Online: Nov. 1, 2012
The Author Email: Xu WANG (wangxu-308@163.com)