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Acta Optica Sinica, Volume. 31, Issue 3, 312007(2011)

Optical 3D Deformation Measurement System and its Application to Investigation of Mechanical Behaviors of Micro-Structure

Shi Hongjian1、*, Ji Hongwei2, and He Xiaoyuan1
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    Shi Hongjian, Ji Hongwei, He Xiaoyuan. Optical 3D Deformation Measurement System and its Application to Investigation of Mechanical Behaviors of Micro-Structure[J]. Acta Optica Sinica, 2011, 31(3): 312007

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 7, 2010

    Accepted: --

    Published Online: Feb. 28, 2011

    The Author Email: Hongjian Shi (shj_seu@yahoo.com.cn)

    DOI:10.3788/aos201131.0312007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology