Acta Optica Sinica, Volume. 25, Issue 9, 1293(2005)
Effect of N2 Mass Flow Rate On the Optical Property of Titanium Nitride Films Deposited by Magnetron Sputtering
[1] [1] J. Kohlscheen, H.-R. Stock, P. Mayr. Chemical bonding in magnetron sputtered TiNx coatings and its relation to diamond turnability[J]. Surface and Coatings Technology, 2001, 142~144: 992~998
[2] [2] E. Budke, J. Krempel-Hesse, H. Maidhof et al.. Decorative hard coatings with improved corrosion resistance[J]. Surface and Coatings Technology, 1999, 112: 108~113
[4] [4] Ph. Roquiny, F. Bodart, G. Terwagne. Color control of titanium nitride coatings produced by reactive magnetron sputtering at temperature less than 100 ℃[J]. Surface and Coatings Technology, 1999, 116~119: 278~283
[5] [5] S. Niyomsoan, W. Grant, D. L. Olson et al.. Variation of color in titanium and zirconium nitride decorative thin films[J]. Thin Solid Films, 2002, 415: 187~194
[6] [6] Ning Jiang, H. J. Zhang, S. N. Bao et al.. XPS study for reactively sputtering titanium nitride thin films deposited under different substrate bias[J]. Physica B, 2004, 352: 118~126
[10] [10] ] R. Manaila, D.Biro, A. Devenyi et al.. Structure of nitride film hard coatings prepared by reactive magnetron sputtering[J]. Appl. Sur. Sci., 1998, 134: 1~10
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[in Chinese], [in Chinese]. Effect of N2 Mass Flow Rate On the Optical Property of Titanium Nitride Films Deposited by Magnetron Sputtering[J]. Acta Optica Sinica, 2005, 25(9): 1293