Acta Photonica Sinica, Volume. 33, Issue 12, 1493(2004)
Heterodyne Measurement and Adaptive Control for Environmental Micro-vibration in Phase-shifting Interferometer
References(3)
[2] [2] Cole G C,Burge J H,Dettmann L R. Vibration stabilization of a phase shifting interferometer for large optics. SPIE,1997,3134: 438～446
[3] [3] Ngoi B K A,Venkatakrishnan K. An aocusto-optic vibrometer for measurement of vibration in ultra-precision machine tools. Int J Adv Manuf Technol, 2000,16(4): 830～834
[7] [7] Analog Devices, Inc. AD8302: LF-2.7GHz RF/IF Gain and Phase Detector Data sheet. 2002
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Heterodyne Measurement and Adaptive Control for Environmental Micro-vibration in Phase-shifting Interferometer[J]. Acta Photonica Sinica, 2004, 33(12): 1493
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