Optics and Precision Engineering, Volume. 26, Issue 5, 1124(2018)

Small precision motion platform based on stick-slip driving principle

SHI Yun-lai*... LOU Cheng-shu, ZHANG Jun and CHENG Ding-ji |Show fewer author(s)
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    To realize precise actuation of micro/nano-manipulation systems, a type of nano-motion platform based on the stick-slip principle was designed. Flexure hinges, a mass block, and an elastic component were integrated as an independent stator base. The stator consisted of a stator base, a piezoelectric stack, and a ceramic ball installed in the base bottom. The vertical position of the end of the elastic component can be adjusted by rotating an adjustment screw to change the pre-pressure between the stator and moving platform. Thus, the optimal driving force can be obtained. Because of the motion mechanisms of stick-slip driving and the influence of various parameters on the platform motion, mechanical modeling was carried out. Friction force was of key significance for stick-slip driving. In order to accurately express the friction mechanism of stick-slip driving, the LuGre friction model was introduced into the mechanical modeling. The simulation analysis was performed using MATLAB/Simulink software. The overall size of the stick-slip driving platform is 40 mm×40 mm×18 mm, and its mass is 32 g. Experiments show that the platform can achieve a minimum step size of 10 nm, its highest speed is 2.5 mm/s, and its stroke is 22 mm.

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    SHI Yun-lai, LOU Cheng-shu, ZHANG Jun, CHENG Ding-ji. Small precision motion platform based on stick-slip driving principle[J]. Optics and Precision Engineering, 2018, 26(5): 1124

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    Paper Information

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    Received: Nov. 23, 2017

    Accepted: --

    Published Online: Aug. 14, 2018

    The Author Email: Yun-lai SHI (shuyunlai950438@nuaa.edu.cn)

    DOI: 10.3788/ope.20182605.1124

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