[1] [1] TAN J B.Some major concern questions in the research of super precision measuring technique and instrument engineering［J］.China Mechanical Engineering.2000,11(3):257-261.

[2] [2] MASUZAWA T,HAMASAKI Y, FUJINO M.Vibroscanning Method for Nondestructive Measurement of Small Holes［C］.Annals of the CIRP.1993,42(1):589-592.

[3] [3] WANG X J,WANG F.Study of micro-mechanical size inspection technology by microscope precision digital image［J］.Opt.Precision Eng.,2001,9(6):511-513.(in chinese)

[4] [4] KIM B J,MASUZAWA T,FUJITA H, et al..Dimensional Measurement of Microholes with Silicon-based Micro Twin Probes［C］.Proceeding of the IEEE Micro Methanical Systems (MEMS).1998:334-339.

[5] [5] YAMAMOTO M, TAKEUCHI H, AOKI S.Dimensional measurement of high aspect ratio structures with a resonating micro cantilever probe［J］.Microsystem Technologies.2000,(6):179-183.

[6] [6] JI G J,SCHWENKE H, TRAPET E, et al..A system for measuring the geometry of spray holes of engine nozzle［J］.Transactions of Csice.,1998,16(4):475-479.

[7] [7] SCHWENKE H, WALDELE F, WEISKIRCH C, el at..Opto-tactile sensor for 2D and 3D measurement of small structures on coordinate measuring machines［C］.CIRP Ann Manuf Technolog, 2001,50(1):361-364.

[8] [8] NEUSCHAEFER-RUBE U,NEUGEBAUER M,EHRIG W, et al..Tactile and Optical Microsensore-Test Prcedures and Standards［C］.ISIST2007, 2007:203-206.

[9] [9] MURALIKRISHNAN B, STONE J, VEMURI S, et al..Fiber Deflection Probe for Small Hole Measurement［C］.In: Proceedings of the ASPE Annual Metting,2004:24-27.

[10] [10] STONE J A,MURALIKRISHNAN B,STOUP J R.A Fiber for CMM Measurements of Small Features［J］.SPIE.2005,5879:58790R-158790R-11.

[11] [11] MURALIKRISHNAN B,STONE J A, STOUP J R.Fiber deflection probe for small hole metrology［J］.Precision Engineering.2006,(30):154-164.

[12] [12] DAI G,WOLFF H,POHLENZ F, et al..Atomic force probe for sidewall scanning of nano-and microstructures［J］.Appl.Phys.Lett.,2006,88,171908-1-171908-3.

[13] [13] DAI G,WOFF H, Hans-Ulrich Danzebrink.Atomic force microscope cantilever based microcoordinate easuring probe for true three-dimensional measurements of microstructures［J］.Appl.Phys.Lett.2007, 91, 121912-1-121912-3.

[14] [14] DAI G,WOFF H,WEIMANN T, et al..Nano-scale furface measurements at sidewalls of nano- and micro-structures［J］.Meas.Sci.Technol.2007,18:334-341.

[15] [15] GAO Y Y,YANG J J,MA X L,et al..Interference Image registration based on Fourier-Mellin algorithom［J］.Opt.Precision Eng.,2007,15(9):1415-1421.(in Chinese)

[16] [16] AO L,TAN J B,CUI J W,et al..Precise center location algorithm for circle target in CCD laser dual axis autocollimator［J］.Opt.Precision Eng.,2005,13(6):668-674.(in Chinese)