Optics and Precision Engineering, Volume. 22, Issue 8, 2007(2014)

Measurement of optical surface based on intensity self-calibration phase-shift algorithm

LIU Jiang1,2、*, MIAO Er-long1, QU Yi1, SUI Yong-xin1, and YANG Huai-jiang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

    [1] [1] BRUNING J H, HERRIOTT D R, GALLAGHER J E, et al.. Digital wavefront measuring interferometer for testing optical surfaces and lenses[J]. Appl. Opt., 1974, 13(11): 2693-2703.

    [2] [2] GREIVENKAMP J E, BRUNING J H. Phase Shifting Interferometry in Optical Shop Testing[M].2nd Edition.New York: Wiley, 1992.

    [4] [4] de GROOT P J, DECK L L.Numerical simulation of vibration in phase-shifting interferometry [J]. Appl. Opt., 1996, 35(13): 2172-2178.

    [5] [5] de GROOT P J. Vibration in phase shifting interferometry[J]. JOSA A, 1995, 12:354-365.

    [7] [7] ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting interferometric measurement[J]. Opt. Precision Eng., 2013, 21(5): 1117-1121.(in Chinese)

    [8] [8] ISHII Y, ONODERA R. Phase-shift-locked interferometer with a wavelength-modulated laser diode[J]. Appl.Opt., 2003, 42: 91-96.

    [9] [9] YU Y J, ZHANG B H, JIAO Y F. Algorithm of phase-shifting by wavelength tunning based on temporal DFT[J]. Acta Metrologica Sinica,2004, 25(4):310-313. (in Chinese)

    [10] [10] SU ZH D, SHI ZH G, SU D Q, et al.. Iterative phase shifting algorithm with normalized intersity in the presence of random and tilt phase shifts[J]. Acta Optica Sinica, 2013, 33(1):0112001.(in Chinese)

    [11] [11] GUO R H, LI J X, ZHU R H, et al.. An adaptive phase selecting method of wavelength tuning at long interference cavity length[J]. Acta Optica Sinica, 2013, 33(1):0112004. (in Chinese)

    [12] [12] GUO R H, LI J X, ZHU R H, et al.. Research on the randomly phase shifting algorithm with wavelength tuning[J]. Chinese Journal of Laser, 2012,39(5):0508002. (in Chinese)

    CLP Journals

    [1] LIU Qian, YUAN Dao-cheng, HE Jian-guo. Phase shift extraction algorithm with error estimation in phase-shifting interferometry[J]. Optics and Precision Engineering, 2016, 24(10): 2565

    [2] ZHAO Wei-qian, LI Wen-yu, ZHAO Qi, QIU Li-rong, WANG Yun. Surface measurement by randomly phase shifting interferometry of measured element[J]. Optics and Precision Engineering, 2016, 24(9): 2167

    [3] LU Bing-hui, LIU Guo-dong, SUN He-yi, LIU Bing-guo, CHEN Feng-dong. Analysis and correction of eccentricity errors in microsphere surface inspection[J]. Optics and Precision Engineering, 2015, 23(10): 2794

    [4] LU Qing-jie, LIU Wei, WEI Guang-yu, HAN Sen. Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration[J]. Optics and Precision Engineering, 2020, 28(4): 878

    [5] ZHANG Xu, LI Xiang, TU Da-wei. Explicit phase height model and its calibration[J]. Optics and Precision Engineering, 2015, 23(8): 2384

    [6] LU Qing-jie, LIU Wei, WEI Guang-yu, HAN Sen. Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration[J]. Optics and Precision Engineering, 2020, 28(4): 878

    [7] Li Dong, Jiang Hongzhen, Liu Yong, Liu Xu. Research on Randomly Phase Shifting Surface Measurement Based on Least-Squares Iteration[J]. Laser & Optoelectronics Progress, 2015, 52(5): 51202

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    LIU Jiang, MIAO Er-long, QU Yi, SUI Yong-xin, YANG Huai-jiang. Measurement of optical surface based on intensity self-calibration phase-shift algorithm[J]. Optics and Precision Engineering, 2014, 22(8): 2007

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    Paper Information

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    Received: Jul. 30, 2013

    Accepted: --

    Published Online: Sep. 15, 2014

    The Author Email: Jiang LIU (liujiang0521@gmail.com)

    DOI:10.3788/ope.20142208.2007

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