Optics and Precision Engineering, Volume. 22, Issue 8, 2007(2014)

Measurement of optical surface based on intensity self-calibration phase-shift algorithm

LIU Jiang1,2、*, MIAO Er-long1, QU Yi1, SUI Yong-xin1, and YANG Huai-jiang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    As the relationship between output intensity and modulation voltage of a modulation laser in Fizeau interferometer will effect the accuracy of phase calculation, this paper proposes an intensity self-calibration phase-shifting algorithm. Firstly, the relationship between output intensity and modulation voltage of the modulation laser was analyzed, and a mathematical model was established. Then, on the basis of least square estimation, the intensity self-calibration phase-shifting algorithm was deduced. Finally, a simulation experiment was performed. The 12 interferograms with changed backgrounds were generated by computers, and their phases were retrieved. The experiment indicates that the algorithm immunes the intensity change well, and retrieves the phase accurately. The measuring results for a flat mirror with a caliber of 100 mm show that the calculated phase precision is RMS of 0.005λ, and PV of 0.073λ. As a comparison with a ZYGO interferometer for the same flat mirror, the deviations are RMS of 0.0014λ, and PV of 0.022λ. Both simulation and experiment results show that the proposed intensity self-calibration phase-shifting algorithm is feasible and practical in the Fizeau interferometer with wavelength tunning.

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    LIU Jiang, MIAO Er-long, QU Yi, SUI Yong-xin, YANG Huai-jiang. Measurement of optical surface based on intensity self-calibration phase-shift algorithm[J]. Optics and Precision Engineering, 2014, 22(8): 2007

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    Paper Information

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    Received: Jul. 30, 2013

    Accepted: --

    Published Online: Sep. 15, 2014

    The Author Email: Jiang LIU (liujiang0521@gmail.com)

    DOI:10.3788/ope.20142208.2007

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