Optical Instruments, Volume. 33, Issue 1, 42(2011)
The method for measuring surface roughness by chromatic focal shift of optical system and its structure analysis
References(2)
[2] [2] TAY C J,QUAN C G.A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering［J］.Optik,2003,114(1):1-6.
[6] [6] SMITH W J.Modern Optical Engineering［M］.3rd ed.Carisbad:McGraw-Hill,2000:72-73.
Tools
Get Citation
Copy Citation Text
WU Yuhao, LI Xiangning, SUN Jinglu, SUN Hui. The method for measuring surface roughness by chromatic focal shift of optical system and its structure analysis[J]. Optical Instruments, 2011, 33(1): 42
Paper Information
Category:
Received: Aug. 5, 2010
Accepted: --
Published Online: Dec. 6, 2012
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20