Optical Instruments, Volume. 33, Issue 1, 42(2011)

The method for measuring surface roughness by chromatic focal shift of optical system and its structure analysis

WU Yuhao... LI Xiangning, SUN Jinglu and SUN Hui |Show fewer author(s)
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    Measurement of surface roughness with optical methods is widely used now due to its contactless,high precision,non-damage,high measuring speed,etc.This paper introduces a new non-contact method based on the confocal optical system to measure the surface roughness,which uses the principle of chromatic focal shift to measure surface roughness.This paper describes the principle of this new method and designs an optical system to analyze and confirm the feasibility of this method.

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    WU Yuhao, LI Xiangning, SUN Jinglu, SUN Hui. The method for measuring surface roughness by chromatic focal shift of optical system and its structure analysis[J]. Optical Instruments, 2011, 33(1): 42

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    Paper Information

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    Received: Aug. 5, 2010

    Accepted: --

    Published Online: Dec. 6, 2012

    The Author Email:

    DOI:10.3969/j.issn.1005-5630.2011.01.010

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