[1] [1] JIN CH SH，WANG ZH SH, CAO J L. The design of soft X-ray projection lithography ［J］. Opt. Precision Eng., 2000, 8(1): 66-70. (in Chinese)

[2] [2] VLADIMIRSKY Y,TAYLOR J S,SOMMARGREN G E, et al.. Fabrication and testing of optics for EUV projection lithography［C］. Proc. SPIE 3331, 1998: 580-590.

[3] [3] WANG L P. Optical system of extreme ultraviolet lithography ［J］. Chinese J. Opt. Appl. Opt., 2010, 3(5): 452-461.(in Chinese)

[4] [4] GLATZEL H,ASHWORTH D,BREMER M, et al.. Projection optics for extreme ultraviolet lithography (EUVL) micro-field exposure tools (METs) with a numerical aperture of 0.5［C］. Proc. SPIE, 8679, 2013: 867917.

[5] [5] JEONG H W,LAWRENCE G N,NAHM K B. Auto-alignment of a three-mirror off-axis telescope by reverse optimization and end-to-end aberration measurements ［C］. In Current Developments in Optical Engineering II, Proc. SPIE 818, 1987: 419-430.

[6] [6] HENRY N C, DONALD W S. Rigorous method for compensation selection and alignment of micro lithographic optical systems［C］. Proc. SPIE 3331,1998: 102-113.

[7] [7] SUN J W, CHEN T, WANG J L, et al.. Computer-aided alignment for primary and secondary mirrors ［J］. Opt. Precision Eng., 2010, 18(10): 2156-2163. (in Chinese)

[8] [8] HU CH H, YAN CH X. Optical-mechanical assembly based on gaussian optical homogeneous coordinate transformation ［J］. Opt. Precision Eng., 2012, 20(11): 2353-2359. (in Chinese)

[9] [9] SEONGHUI K, HOSOON Y, YUN-WOO L, et al.. Merit function regression method for efficient alignment control of two-mirror optical systems ［J］. Optics Express, 2007, 15(8):5059-5068.

[10] [10] LEE J H,RYOO S,PARK K W, et al.. Development of a computer-aided alignment simulator for an EO/IR dual-band airborne camera ［C］. Proc. SPIE 8417, 2012:84170E.

[11] [11] YANG X F, ZHANG X H, HAN CH Y. Application of Zemax software in alignment of three-mirror off-axis aspherical optical system ［J］. Opt. Precision Eng., 2004，12(3):270-274. (in Chinese)

[12] [12] LIU L, WANG Y, ZHANG X D. Computer-aided alignment based on DWC wave-front testing ［J］. Laser and Infrared, 2013,43(4): 428-432. (in Chinese)

[13] [13] LIN Q, JIN CH SH, XIANG P,et al.. Computer-aided alignment of schwarzschild objective with off-axis illumination［J］. Opt. Precision Eng., 2003，11(2):144-150. (in Chinese)

[14] [14] CLAMPIN M C,BOS B J,HOWARD J M, et al.. Global alignment optimization strategies, procedures, and tools for the James Webb Space Telescope (JWST) Integrated Science Instrument Module (ISIM) ［C］. SPIE 8442, 2012: 84423I.

[15] [15] ZHAO Y, GONG Y. Computer aided alignment of small scale projected objective ［J］. Chinese Optics, 2012,5(4)：394-400. (in Chinese)