Journal of Semiconductors, Volume. 44, Issue 9, 091601(2023)
Low-temperature metal–oxide thin-film transistor technologies for implementing flexible electronic circuits and systems
Fig. 1. (Color online) (a) A schematic cross-section of an IGZO or IGZO:F TFT. (b) Comparison of the measured transfer characteristics of IGZO:F and IGZO TFTs with W = 10 µm and L decreasing from 50 to 2 µm. (c) Comparison of the measured transfer characteristics of IGZO:F and IGZO TFTs before and after LLO. (d) Measured statistical distributions of the
Fig. 2. (Color online) The fabrication process of SG and DG ITZO TFTs.
Fig. 3. (Color online) Transfer characteristics of (a) SG TFTs, (b) DG TFTs with BG as the MG and TG as the OG, and (c) DG TFTs with TG as the MG and BG as the OG; extracted
Fig. 4. (Color online) Fluorination-enhanced 2-4 decoder[17]. (a) Gate-level schematic and truth table of a 2-4 decoder. (b) TFT-level circuit diagram and truth table of an INV. (c) TFT-level circuit diagram and truth table of a NOR. (d) A photograph of a fabricated 2-4 decoder on PI. (e) Measured VTCs of 2-4 decoders fabricated using IGZO:F TFTs. (f) Measured VTCs of 2-4 decoders fabricated using IGZO TFTs. (g) Simulated VTCs of ideal implementation with the same
Fig. 5. (Color online) An AFE system for the acquisition of bio-potential signals. (a) System architecture. (b) PI carrying AFE systems placed on the thenar muscle of a hand. In-vitro measurements of (c) EMG and (d) ECG[21]. Copyright 2023 Wiley.
Fig. 6. (Color online) DG ITZO TFT-based in-pixel amplifiers w/ and w/o provision for compensation of TFT parameter variation: (a) circuit schematic and (b) timing diagram; (c) distribution of MG voltage
Fig. 7. (Color online) MG voltage
Fig. 8. (Color online) A schematic system diagram of a more capable bio-potential acquisition system on a flexible substrate.
Fig. 9. (Color online) Flexible tactile sensor array integrated with an artificial neural network as a bionic “smart” system.
Get Citation
Copy Citation Text
Runxiao Shi, Tengteng Lei, Zhihe Xia, Man Wong. Low-temperature metal–oxide thin-film transistor technologies for implementing flexible electronic circuits and systems[J]. Journal of Semiconductors, 2023, 44(9): 091601
Category: Articles
Received: Apr. 23, 2023
Accepted: --
Published Online: Oct. 25, 2023
The Author Email: Xia Zhihe (eemwong@ust.hk), Wong Man (eemwong@ust.hk)