Chinese Optics Letters, Volume. 13, Issue Suppl., S22203(2015)
Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing
Fig. 1. MRF polishing system: (a) manufacturing center MRF-2500 with the dual MRF polishing wheel; (b) picture of the 400 mm diameter MRF polishing wheel.
Fig. 2. Removal function of different working distances: (a) 1, (b) 1.2, (c) 1.5, and (d) 2 mm.
Fig. 3. Relationship between the removal function parameters and the working distance.
Fig. 4. Surface map: (a) original map; (b) virtual fabrication with removal function in Fig.
Fig. 5. PSD analysis on Figs.
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Xu Wang. Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22203
Category: Optical Design and Fabrication
Received: Jan. 13, 2015
Accepted: Mar. 10, 2015
Published Online: Aug. 8, 2018
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