Chinese Optics Letters, Volume. 13, Issue Suppl., S22203(2015)

Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing

Xu Wang
Author Affiliations
  • Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun 130033, China
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    Figures & Tables(10)
    MRF polishing system: (a) manufacturing center MRF-2500 with the dual MRF polishing wheel; (b) picture of the 400 mm diameter MRF polishing wheel.
    Removal function of different working distances: (a) 1, (b) 1.2, (c) 1.5, and (d) 2 mm.
    Relationship between the removal function parameters and the working distance.
    Surface map: (a) original map; (b) virtual fabrication with removal function in Fig. 2(a); (c) virtual fabrication with removal function in Fig. 2(d).
    PSD analysis on Figs. 4(a)–4(c).
    • Table 1. MRF-2500 Parameters

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      Table 1. MRF-2500 Parameters

      Maximum Mirror Diameter2500 mm
      X Axial Length3000 mm
      Y Axial Length3000 mm
      Z1 Axial Length800 mm
      Z2 Axial Length800 mm
      A Axes Swing Range±45°
    • Table 2. Working Parameters of the 400 mm Polishing Wheel

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      Table 2. Working Parameters of the 400 mm Polishing Wheel

      Wheel Rotation Speed60rev/min
      Velocity of the Wheel1.256m/min
      MRF Volume1.5L/min
      Fabrication Time10 s
      Working Distance1, 1.2, 1.5, and 2 mm
    • Table 3. Parameters of Removal Function under Different Working Distances

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      Table 3. Parameters of Removal Function under Different Working Distances

      Working Distance (mm)PV (μm/min)Volume Rate (mm3/min)Length (mm)Width (mm)
      11.7450.25128.914.4
      1.21.5960.18027.111.8
      1.51.2860.12124.310.4
      21.1740.08323.39.30
    • Table 4. Fitting Parameters

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      Table 4. Fitting Parameters

      ParameterabAdjusted R2
      PV Removal Rate1.746−0.6190.9436
      Volume Removal Rate0.249−1.6880.9938
      Removal Function Length28.678−0.3300.9307
      Removal Function Width13.929−0.6500.9155
    • Table 5. Surface Data Error

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      Table 5. Surface Data Error

       Original SurfaceFig. 2(a)Fig. 2(d)Convergence Fig. 2(a)/Fig. 2(d) (%/%)
      PV (λ)4.72870.97241.02079.44/78.43
      rms (λ)0.55130.0140.02497.46/95.65
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    Xu Wang. Removal function research on the fused silica mirror with 400 mm polishing wheel of the magnetorheological finishing[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22203

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 13, 2015

    Accepted: Mar. 10, 2015

    Published Online: Aug. 8, 2018

    The Author Email:

    DOI:10.3788/COL201513.S22203

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