Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

Jinhua Zhao; Xueshuai Jiao; Yingying Ren; Jinjun Gu; Sumei Wang; Mingyang Bu; Lei Wang

doi:10.3788/COL202119.060009

Chinese Optics Letters, Volume. 19, Issue 6, 060009(2021)

Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

Jinhua Zhao^1、*, Xueshuai Jiao¹, Yingying Ren², Jinjun Gu¹, Sumei Wang¹, Mingyang Bu¹, and Lei Wang³

Author Affiliations

¹School of Science, Shandong Jianzhu University, Jinan 250101, China

²Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China

³School of Physics, Shandong University, Jinan 250100, China

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Jinhua Zhao, Xueshuai Jiao, Yingying Ren, Jinjun Gu, Sumei Wang, Mingyang Bu, Lei Wang. Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing[J]. Chinese Optics Letters, 2021, 19(6): 060009

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Paper Information

Category: Special Issue on Lithium Niobate Based Photonic Devices

Received: Feb. 5, 2021

Accepted: Apr. 7, 2021

Published Online: May. 8, 2021

The Author Email: Jinhua Zhao (zhaojinhua@sdjzu.edu.cn)

DOI:10.3788/COL202119.060009

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology