Optics and Precision Engineering, Volume. 16, Issue 6, 1075(2008)

Sulfur dioxide poison gas sensor based on MEMS laminated microstructure

SHI Yun-fen1,*... SHI Yun-bo2, LIU Yue-hua1, FENG Qiao-hua2, ZHAO Wen-jie2 and LEI Ting-ping2 |Show fewer author(s)
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    SHI Yun-fen, SHI Yun-bo, LIU Yue-hua, FENG Qiao-hua, ZHAO Wen-jie, LEI Ting-ping. Sulfur dioxide poison gas sensor based on MEMS laminated microstructure[J]. Optics and Precision Engineering, 2008, 16(6): 1075

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    Paper Information

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    Received: Jan. 29, 2008

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Yun-fen SHI (shiyunfen0220@163.com)

    DOI:

    CSTR:32186.14.

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