Optics and Precision Engineering, Volume. 16, Issue 6, 1075(2008)
Sulfur dioxide poison gas sensor based on MEMS laminated microstructure
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SHI Yun-fen, SHI Yun-bo, LIU Yue-hua, FENG Qiao-hua, ZHAO Wen-jie, LEI Ting-ping. Sulfur dioxide poison gas sensor based on MEMS laminated microstructure[J]. Optics and Precision Engineering, 2008, 16(6): 1075
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Received: Jan. 29, 2008
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Yun-fen SHI (shiyunfen0220@163.com)
CSTR:32186.14.