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Acta Photonica Sinica, Volume. 47, Issue 12, 1214003(2018)

Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components

YU Lei1,*... YANG Shuang-ning1, LIU Xue-qing1,2 and LI De-hui1 |Show fewer author(s)
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    YU Lei, YANG Shuang-ning, LIU Xue-qing, LI De-hui. Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components[J]. Acta Photonica Sinica, 2018, 47(12): 1214003

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    Paper Information

    Received: Jul. 16, 2018

    Accepted: --

    Published Online: Jan. 10, 2019

    The Author Email: Lei YU (yulei32205@163.com)

    DOI:10.3788/gzxb20184712.1214003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology