Optics and Precision Engineering, Volume. 23, Issue 5, 1387(2015)

Fluid-structure interaction of MEMS vector hydrophone in packing processing

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    References(13)

    [1] [1] YANG S T.The research of deep-water vector hydrophone [D].Harbin: Harbin Engineering University, 2010. (in Chinese)

    [3] [3] LI Z G, ZHAN F L. Virtual.lab Acoustic Simulation Calculation Application [M]. Beijing: National Defense Industry Press, 2013. (in Chinese)

    [4] [4] JEONG K H, LEE G M, KIMET T W.Free vibration analysis of a circular plate partially in contact with a liquid [J].Journal of Sound and Vibration, 2009, 324(1/2): 194-208.

    [5] [5] ALDO M, AGNESE C, SALVATORE P, et al.. Modal analysis of a cantilever beam by use of Brillouin based distributed dynamic strain measurements [J]. Smart Materials and Structures, 2012, 21(12): 1-7.

    [6] [6] KOZLOVSKY Y.Vibration of plates in contact with viscous fluid: extension of Lambs model [J]. Journal of Sound and Vibration, 2009, 326(1/2): 332-339.

    [7] [7] TIKESWAR N, ELLEN K L, SUSAN C M.Dynamic response of a cantilever in liquid near a solid wall [J].Sensors and Actuators: A, 2003, 102(3): 240-254.

    [10] [10] LI ZH, ZHANG G J, XUE CH Y, et al.. The design and research of encapsulation on MEMS bionic vector hydrophone [J]. Chinese Journal of Sensor and Actuators. 2013, 26(1): 25-30. (in Chinese)

    [11] [11] JU R CH, ZENG X CH.Coupling Vibration Theory Between Elastic Structure and Liquid [M]. Beijing: Seismological Press, 1983. (in Chinese)

    [12] [12] CHEN SH. Research of MEMS Bionic Vector Hydrophone Based on Silicon [D]. Taiyuan: North University of China, 2008. (in Chinese)

    [13] [13] FEI T. The vector hydrophone calibration device [J]. Technical Acoustics, 2005(supplement): 289-291. (in Chinese)

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fluid-structure interaction of MEMS vector hydrophone in packing processing[J]. Optics and Precision Engineering, 2015, 23(5): 1387

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    Paper Information

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    Received: Dec. 15, 2014

    Accepted: --

    Published Online: Jun. 11, 2015

    The Author Email: (liumengran1991@163.com)

    DOI:10.3788/ope.20152305.1387

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