Semiconductor Optoelectronics, Volume. 41, Issue 2, 195(2020)

Research on Special Modal Vibration Characteristics of Piezoelectric Resonators

LIANG Tianchen*... WU Xiaosheng and LI Zhichao |Show fewer author(s)
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    References(9)

    [1] [1] Li Guobin, Wu Xiaosheng. Design of digital detection circuit for piezoelectric gyroscope based on FPGA[J]. Transducer and Microsystem Technol., 2016, 35(9): 1-3.

    [2] [2] Wu Xiaosheng, Lu Yipeng, Chen Wenyuan. Modal and harmonic analysis of piezoelectric solid-state micromachined modal gyroscope (PSMMG)[J]. Chinese J. of Sensors and Actuators, 2008, 21(12): 2014-2019.

    [3] [3] Wei Nian, Wu Xiaosheng, Liu Wu, et al. Mounting technology of piezoelectric micromachined modal gyroscope[J]. Transducer and Microsystem Technol., 2015, 34(10): 41-43, 53.

    [4] [4] Zhao Cong, Wu Xiaosheng, Li Guobin, et al. Load effect research of piezoelectric micro cuboid resonator charge amplifiers[J]. Instrument Technique and Sensor, 2016(9): 117-119.

    [6] [6] He Y S, Wu X S, Zheng F, et al. Document closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope[J]. Microsystem Technologies, 2014, 20(2): 185-191.

    [7] [7] Wang Zhenyu, Wu Xiaosheng, Shu Shengzhu. Resonance characteristics of piezoelectric resonator based on digital driving circuit of field-programmable gate array[J]. Shanghai Jiaotong University, 2019, 24(1): 1-6.

    [9] [9] Wu Xiaosheng, Chen Wenyuan, Lu Yipeng, et al. Vibration analysis of a piezoelectric micromachined modal gyroscope (PMMG)[J]. J. of Micromechanics and Microengin., 2009, 19(12): 125008.

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    LIANG Tianchen, WU Xiaosheng, LI Zhichao. Research on Special Modal Vibration Characteristics of Piezoelectric Resonators[J]. Semiconductor Optoelectronics, 2020, 41(2): 195

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    Paper Information

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    Received: Dec. 13, 2019

    Accepted: --

    Published Online: Jun. 17, 2020

    The Author Email: Tianchen LIANG (740795516@qq.com)

    DOI:10.16818/j.issn1001-5868.2020.02.010

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