Optics and Precision Engineering, Volume. 26, Issue 5, 1046(2018)
Research of scanning slit with minimal penumbra of blades edge in lithography
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LIN Dong-liang, ZHANG Fang, HUANG Hui-jie. Research of scanning slit with minimal penumbra of blades edge in lithography[J]. Optics and Precision Engineering, 2018, 26(5): 1046
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Received: Oct. 10, 2017
Accepted: --
Published Online: Aug. 14, 2018
The Author Email: Dong-liang LIN (LDLQWE@126.com)
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