Journal of Synthetic Crystals, Volume. 52, Issue 9, 1651(2023)
Ultra Precision Cutting Characteristics of Monocrystalline Silicon Based on Nanoindentation and Nanoscratch Experiments
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CUI Jie, YANG Xiaojing, LI Yunlong, ZHANG Gaozan, LI Zongrui. Ultra Precision Cutting Characteristics of Monocrystalline Silicon Based on Nanoindentation and Nanoscratch Experiments[J]. Journal of Synthetic Crystals, 2023, 52(9): 1651
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Received: Apr. 5, 2023
Accepted: --
Published Online: Oct. 7, 2023
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CSTR:32186.14.
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