Infrared and Laser Engineering, Volume. 53, Issue 9, 20240331(2024)

Interferometric wavefront sensing and its applications based on quadriwave lateral shearing interferometry (invited)

Yongying YANG1...4,*, Tong LING2,3,4,*, Pin CAO4 and Jiabin JIANG4 |Show fewer author(s)
Author Affiliations
  • 1College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 2School of Chemistry, Chemical Engineering and Biotechnology, Nanyang Technological University, Singapore 639798
  • 3School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798
  • 4Hangzhou Zernike Optical Technology Co., Ltd., Hangzhou 310027, China
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    References(36)

    [19] P P NAULIEAU, K A GOLDBERG, J BOKOR. Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system. Journal of Vacuum Science & Technology B, 18, 2939-2943(2000).

    [22] [22] CHANTELOUP JC F, COHEN M. Compact high resolution four wave lateral shearing interferometer [C]Conference on Optical Fabrication, Testing, Metrology, Proceedings of SPIE, 2004, 5252: 282292.

    [24] [24] LING T, LIU D, SUN L, et al. Wavefront retrieval f crossgrating lateral shearing interferometer based on differential Zernike polynomial fitting [C]Optical Manufacturing Testing X, Proceedings of SPIE, 2013, San Diego, Califnia, United States, 2013, 8838: 88380J.

    [26] [26] LING T, YANG Y, LIU D, et al. Retrieval of phase distributions from the quadriwave lateral shearing interferogram obtained by romly encoded hybrid grating [C]SPIE Optifab, 2015, Rochester, New Yk, United States, 2015, 9633: 96332G.

    [32] [32] VELGHE S, BRAHMI D, BOUCHER W, et al. MWIR LWIR wavefront sensing with quadriwave lateral shearing interferometry [C]SPIE Defense, Security, Sensing, 2009, lo, Flida, United States, 2009, 7300: 73000T.

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    Yongying YANG, Tong LING, Pin CAO, Jiabin JIANG. Interferometric wavefront sensing and its applications based on quadriwave lateral shearing interferometry (invited)[J]. Infrared and Laser Engineering, 2024, 53(9): 20240331

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    Paper Information

    Category: Special issue—Computational optical imaging and application Ⅱ

    Received: Jul. 18, 2024

    Accepted: --

    Published Online: Oct. 22, 2024

    The Author Email: YANG Yongying (yyyang07@163.com), LING Tong (tong.ling@ntu.edu.sg)

    DOI:10.3788/IRLA20240331

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