Acta Optica Sinica, Volume. 27, Issue 6, 1031(2007)
Microscopic Dark-Field Scattering Imaging and Digitalization Evaluation System of Defects on Optical Devices Precision Surface
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[2] [2] Sun Dandan, Yang Yongying, Wang Fengquan et al.. Microscopic scattering imaging system of defects on ultra-smooth surface suitable for digital image processing[C]. Proc. SPIE, 2005, 6150: 6150012-1~6150012-6
[4] [4] M. Born, E. Wolf. Principles of Optics[M]. 7th Edition, Cambridge: Cambridge University Press, 1999. 695~734
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microscopic Dark-Field Scattering Imaging and Digitalization Evaluation System of Defects on Optical Devices Precision Surface[J]. Acta Optica Sinica, 2007, 27(6): 1031