[2] [2] ZHOU Shao-lin, FU Yong-qi, TANG Xiao-ping, et al. Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography［J］. Optics Express, 2008, 16(11): 7869-7880.

[3] [3] ZHOU Shao-lin, TANG Xiao-ping, HU Song, et al. Analysis of Moire pattern of dual gratings alignment in nanometer lithography［J］. Microfabrication Technology, 2008, 3: 13-17.

[4] [4] ZHOU Shao-lin, YANG Yong, CHEN Wang-fu, et al. Dual-grating-based nanometer measurement［J］. Acta Optica Sinica, 2009, 29(3): 702-706.

[5] [5] XU Feng, HU Song, ZHOU Shao-lin, et al. Interference fringe pattern phase analysis in alignment of nano lithography［J］. Acta Optica Sinica, 2012, 32(2): 0212001: 1-6.

[6] [6] HUANG Bai-sheng, XU Jia-dong. Fast phase unwrapping method for interferometric phase based in new quality-guided［J］.Journal of System Simulation, 2010, 22(2): 528-531, 541.

[7] [7] GHIGLIA D C, ROMERO L A. Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods［J］. Journal of Optical Society of America A, 1994, 11(1): 107-117.

[8] [8] LU Yuan-gang, WANG Xiang-zhang, ZHANG Xu-ping. Weighted least-squares phase unwrapping algorithm based on derivative variance correlation map［J］. Optik, 2007, 118(2): 3627-3632.

[9] [9] ZHANG Xiong, QIAN Xiao-fan. An improvement on the Least-squares phase unwrapping algorithm for under sampled Interferogram［J］. Acta Photonica Sinicas, 2011, 40(1): 121-125.

[10] [10] QIAN Xiao-fan, RAO Fan, LI Xing-hua, et al. Accurate Least-Squres phase unwrapping algorithm［J］. Chinese Journal of Laser, 2012, 29(2): 0209001, 1-5.

[11] [11] QIAN Ke-mao, GAO Wen-jing, WANG Hai-xia. Windowed Fourier-filtered and quality-guided phase-unwrapping algorithm［J］. Applied Optics, 2008, 47(29): 5420-5428.

[12] [12] LI Si-kun, CHEN Wen-jing, SU Xian-yu. Reliability-guided phase unwrapping in wavelet-transform profilometry［J］. Applied Optics, 2008, 47(18): 3369-3377.

[13] [13] CUI Hai-hua, LIAO Wen-he, CHENG Xiao-sheng, et al. Mathematic descriptions and analysis of quality weighting factors in phase unwrapping algorithms［J］. Acta Optica Sinica, 2010, 30(1): 90-104.

[14] [14] WU Yong-hui, CHENG Xiao-sheng, CUI Hai-hua, et al. A novel method for 2D phase unwrapping guided by quality cut［J］. Chinese Journal of Laser, 2012, 39(3): 0308004, 1-6.

[15] [15] LU Yuan-gang, ZHAO Wan-cheng, ZHANG Xu-ping, et al. Weighted-phase-gradient-based quality maps for two-dimensional quality-guided phase unwrapping［J］. Optics and Laser in Engineering, 2012, 50(10): 1397-1404.

[16] [16] CHEN Ke, XI Jiang-tao, YU Yang-guang. Quality-guided spatial phase unwrapping algorithm for fast three-dimensional measurement［J］. Optics Communications, 2013, 294: 139-147.