Infrared and Laser Engineering, Volume. 53, Issue 10, 20240323(2024)

Design method of off-axis three-mirror optical system for testability of mirror surface shape error

Haixin ZHANG1,2, Qingyu MENG1, Jiangnan WANG1,2, Meichen LIU1,2, and Lei LI1,2
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(15)
    CGH testing optical path diagram
    Schematic diagram of CGH phase function calculation
    CGH calculation schematic diagram based on even aspherical surface
    Design process diagram
    Coaxial three-mirror optical system
    Initial structure of off-axis three-mirror optical system
    Optical system optimized for image quality-"System 1". (a) Layout diagram; (b) MTF diagram
    CGH phase function diagram (a) and compensation periods diagram (b)
    Optimization result for "System 2". (a) Layout diagram; (b) MTF diagram
    CGH phase function diagram (a) and compensation periods diagram (b)
    The system MTF when the minimum line width increases
    • Table 1. Optical system index requirements

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      Table 1. Optical system index requirements

      Optical system indexRequirement
      Focal length/mm800
      F-number4
      Filed of view/(°)14×2
      Wavelength/nm632.8
    • Table 2. Tertiary mirror parameters of "System 1"

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      Table 2. Tertiary mirror parameters of "System 1"

      ParameterValue
      D/mm1030
      R/mm1291.19
      k0.1839
      A61.0120×10−18
      A81.0626×10−24
      Test area/mmX direction: −319-+319Y direction: 166-463
    • Table 3. CGH parameters

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      Table 3. CGH parameters

      ParameterValue
      D/mm80
      d1/mm1180
      d2/mm180
      Maximum spatial frequency/lp·mm–1207.3
      Minimum line width position/mm36.9
      Minimum line width/μm4.84
    • Table 4. Tertiary mirror parameters of "System 2"

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      Table 4. Tertiary mirror parameters of "System 2"

      ParameterValue
      D/mm716
      R/mm1269.44
      k0.1867
      A61.1749×10−18
      A82.1438×10−24
      Test area/mmX direction: −320-320Y direction: −51-264
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    Haixin ZHANG, Qingyu MENG, Jiangnan WANG, Meichen LIU, Lei LI. Design method of off-axis three-mirror optical system for testability of mirror surface shape error[J]. Infrared and Laser Engineering, 2024, 53(10): 20240323

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    Paper Information

    Category: 光学设计

    Received: Jul. 16, 2024

    Accepted: --

    Published Online: Dec. 13, 2024

    The Author Email:

    DOI:10.3788/IRLA20240323

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