Acta Photonica Sinica, Volume. 45, Issue 6, 631001(2016)
Monitoring Method for Filter Film Thickness Based on the Combination of Photoelectric Extreme Value and Quartz Crystal Oscillation
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ZHANG Xue-dian, QIAN Yan-hua, CHANG Min, JIANG Min-shan. Monitoring Method for Filter Film Thickness Based on the Combination of Photoelectric Extreme Value and Quartz Crystal Oscillation[J]. Acta Photonica Sinica, 2016, 45(6): 631001
Received: Dec. 8, 2015
Accepted: --
Published Online: Jul. 26, 2016
The Author Email: Xue-dian ZHANG (zhangxuedian@hotmail.com)