Acta Photonica Sinica, Volume. 45, Issue 6, 631001(2016)

Monitoring Method for Filter Film Thickness Based on the Combination of Photoelectric Extreme Value and Quartz Crystal Oscillation

ZHANG Xue-dian1...2,*, QIAN Yan-hua1, CHANG Min1,2, and JIANG Min-shan12 |Show fewer author(s)
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    References(17)

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    [14] [14] LI Zhan-feng, SHANG Li-ping. Film thickness on-line measurement method by quartz crystal differential[J]. Chinese Journal of Scientific Instrument, 2001, 22(3): 99-100.

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    ZHANG Xue-dian, QIAN Yan-hua, CHANG Min, JIANG Min-shan. Monitoring Method for Filter Film Thickness Based on the Combination of Photoelectric Extreme Value and Quartz Crystal Oscillation[J]. Acta Photonica Sinica, 2016, 45(6): 631001

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    Paper Information

    Received: Dec. 8, 2015

    Accepted: --

    Published Online: Jul. 26, 2016

    The Author Email: Xue-dian ZHANG (zhangxuedian@hotmail.com)

    DOI:10.3788/gzxb20164506.0631001

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