Opto-Electronic Engineering, Volume. 50, Issue 3, 220041(2023)
Research progress of laser manufacturing technology for microstructure sensor
[25] [25] Xiao J Y. Construction of novel wearable biosensors and their researches on sweat analysis[D]. Beijing: University of Science and Technology Beijing, 2022.
[44] [44] He Y H. The fabrication and capability researches about flexible piezoresistive sensor based on SU8 photoresist[D]. Chengdu: University of Electronic Science and Technology of China, 2019.
[58] [58] Palaniappan V, Masihi S, Panahi M, et al. Laser-assisted fabrication of flexible micro-structured pressure sensor for low pressure applications[C]//2019 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS), 2019: 1–3.
[73] [73] Zhu Y S. Design, fabrication and modeling of Graphene epidermal pressure sensor[D]. Hefei: University of Science and Technology of China, 2018.
[76] [76] Romero FJ, Ortiz-Gomez I, Salinas A, et al. Temperature sensing by laser reduced graphene oxide at different laser power levels[C]//2020 IEEE Sensors, 2020: 1–5.
[77] [77] Kazemzadeh R, Kim W S. Flexible temperature sensor with laser scribed Graphene oxide[C]//14th IEEE International Conference on Nanotechnology, 2014: 420–423.
[88] [88] Mania G K, Ponnusamy D, Tsuchiya K. Ultrafast fabrication of microneedle array for transdermal Ion detection[C]//2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS), 2018: 1–3.
Get Citation
Copy Citation Text
Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041
Category: Article
Received: Apr. 7, 2022
Accepted: Jul. 19, 2022
Published Online: May. 4, 2023
The Author Email: