Opto-Electronic Engineering, Volume. 50, Issue 3, 220041(2023)

Research progress of laser manufacturing technology for microstructure sensor

Rui Chen1... Jincheng Wang1, Wenzhuo Zhang1, Dongsheng Ji1, Xinning Zhu1, Tao Luo1,2, Jing Wang1 and Wei Zhou1,* |Show fewer author(s)
Author Affiliations
  • 1Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2The State Key Laboratory of Fluid Power & Mechatronic Systems, Zhejiang University, Hangzhou, Zhejiang 310027, China
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    [73] [73] Zhu Y S. Design, fabrication and modeling of Graphene epidermal pressure sensor[D]. Hefei: University of Science and Technology of China, 2018.

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    Rui Chen, Jincheng Wang, Wenzhuo Zhang, Dongsheng Ji, Xinning Zhu, Tao Luo, Jing Wang, Wei Zhou. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041

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    Paper Information

    Category: Article

    Received: Apr. 7, 2022

    Accepted: Jul. 19, 2022

    Published Online: May. 4, 2023

    The Author Email:

    DOI:10.12086/oee.2023.220041

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