Chinese Optics Letters, Volume. 7, Issue 12, 1117(2009)
In-line digital holography for dynamic metrology of MEMS
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[in Chinese], [in Chinese]. In-line digital holography for dynamic metrology of MEMS[J]. Chinese Optics Letters, 2009, 7(12): 1117
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Received: Jun. 18, 2009
Accepted: --
Published Online: Dec. 18, 2009
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