Infrared and Laser Engineering, Volume. 32, Issue 6, 651(2003)
Etching study of micro-cavity with flexible film of novel infrared detector
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Etching study of micro-cavity with flexible film of novel infrared detector[J]. Infrared and Laser Engineering, 2003, 32(6): 651